Asher - Anatech Barrel SCE600 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: David Hays
Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

Plasma Ashing wiki link
Microfabrication wiki link

NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a RSC Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. Latest Status Log EntryJan 3, 2022 - Resource Status Up - tool is back up from break

To select the time for your reservation, or to view/contact the creator of a reservation, click on the RSC icon Reservation Options in the calendar below. Note: If the RSC icon does not appear, the following link may also be used to create a reservation: Create Reservation (Quick Form)

Reminder: Missed reservations incur a processing fee. Please manage your reservations wisely.

Calendar ICS Path