Asher - Anatech Barrel SCE600 - Status: Available
||Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.
Plasma Ashing wiki link
Microfabrication wiki link
NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a RSC Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. Latest Status Log EntryOct 13, 2023 - Resource Status Up - PLC backup complete
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
An active Gatorlink login is required to create a new reservation.