Asher - Anatech Barrel SCE600 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: David Hays
Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

Plasma Ashing wiki link
Microfabrication wiki link

NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a RSC Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. Latest Status Log EntryJan 3, 2022 - Resource Status Up - tool is back up from break

Use Prerequisites

PrerequisiteDescription
Computer AccessRequires computer access be setup
Funding SourceRequires permission to an active funding source
Work PlanRequires a work plan be approved by PI and staff
Agreement FormRequires completed agreement form for equipment usage
RSC Safety TrainingRequires completion of safety training
NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.
Equipment TrainingRequires completion of equipment training

View your prerequisite status for the Asher - Anatech Barrel SCE600.