JEOL Superprobe 733 - Status: Available
||Electron Probe MicroAnalysis (EPMA):
is an analytical tool used to determine the chemical composition of small volumes of solid materials.
The sample is bombarded with an electron beam, emitting x-rays at wavelengths characteristic to the elements being analyzed.
This enables the assessment of the amount of elements present within small sample volumes (typically 10-30 μm3).
Qualify as an independent user of the SEM 6400. Latest Status Log EntryJun 27, 2017 - User Note: It is only available with staff assistance.
Electron Probe MicroAnalysis
Typical Applications: Elemental Microanalysis
Signal Detected: X-Rays
Elements Detected: B-U
Detection Limits: WDS 100 ppm, EDS 0.1 wt% Z>11, 1-2 wt% Z<11
Depth Resolution: 0.2 – 5 μm.
Lateral Resolution/Probe Size: 1 – 5 μm.
Available JEOL Superprobe 733 Consumables: Al - Mounts 1 inch, Al - Mounts 3/8 inch, Au-Pd Coating, C - Mounts 1 inch, C - Mounts 3/8 inch, C - Tabs, Carbon Coating, Carbon Paint, Film