Asher - Tepla M4L - Status: Available
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The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.
Plasma Ashing wiki link Microfabrication wiki link Latest Status Log EntryMay 17, 2024 - Resource Status Up - up. installed and connected new throttle valve. had issue with throttle setting in software and will require advantech driver setup to control throttle valve. backup up hd to rsc backup hd. converted tool to ssd drive. old hd inside tool |
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
An active Gatorlink login is required to create a new reservation.