Asher - Tepla M4L - Status: Available
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The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.
Plasma Ashing wiki link Microfabrication wiki link Latest Status Log EntryMay 17, 2024 - Resource Status Up - up. installed and connected new throttle valve. had issue with throttle setting in software and will require advantech driver setup to control throttle valve. backup up hd to rsc backup hd. converted tool to ssd drive. old hd inside tool |
Use Prerequisites
Prerequisite | Description | Status |
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Computer Access | Requires computer access be setup | Check Your Status |
Funding Source | Requires permission to an active funding source | Check Your Status |
Work Plan | Requires a work plan be approved by PI and staff | Check Your Status |
Agreement Form | Requires completed agreement form for equipment usage | Check Your Status |
RSC Safety Training | Requires completion of safety training | Check Your Status |
NRF Building Access | Requires issue of an id badge and entry badge and/or access level to be set. | Check Your Status |
Equipment Training | Requires completion of equipment training | Check Your Status |
An active Gatorlink login is required to create a new reservation.