Asher - Tepla M4L - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $67.50/Hour
    • External Affiliated Commercial/Industrial: $67.50/Hour
    • External Commercial/Industrial: $90.00/Hour
    • External International Academic: $90.00/Hour
    • Internal Standard: $45.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.

Plasma Ashing wiki link
Microfabrication wiki link
Latest Status Log EntryMay 17, 2024 - Resource Status Up - up. installed and connected new throttle valve. had issue with throttle setting in software and will require advantech driver setup to control throttle valve. backup up hd to rsc backup hd. converted tool to ssd drive. old hd inside tool
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
Tepla Asher M4L TrainingStandard Rate: $19.00/Complete User TrainingN/A

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