Standard Operating Procedures (SOPs)

Resource Specific SOPs

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Name
AES, PHI 660 SOP
AFM, Dimension 3100 SOP
Asher, Anatech Barrel SCE600 SOP
Bruker Optical Profilometer SOP
Deep RIE, STS SOP
E-beam Evaporator, PVD SOP
EBSD reading: basics, present state
EBSD reading: EDAX camera optimization presentation
EBSD reading: EDAX grains and antigrains presentation
EBSD reading: EDAX sample prep presentation
Electron Microscope, JEOL 5700 SOP
Electronic Measurement, Lakeshore 7507 SOP
Ellipsometer, J.A. Woolam SOP
F20 acquiring DPs procedure
F20 atomic-resolution imaging in STEM mode
F20 imaging in STEM mode
F20 imaging in TEM mode
F20 operation at 80 kV
F20 performing EDS in STEM mode
F20 performing EDS in TEM mode
F20 WBDF operation
FEI SEM SOP
Flexus SOP
FPP-5000 4 point probe SOP
General Acids/Bases Bench Left & Right SOP
Helios - FEI manufacturer manual
Helios - publication on TEM specimen prep via FIB by Schaffer (2012)
Helios - recipe for preparing TEm specimens
Helios - standard operating procedure
Hitachi S3000 SOP
JST Wet Bench SOP
K&S 4124 Ball Bonder, Gold Ball SOP
Laser Writer, Heidelberg SOP
Laser Writer, Pattern Conversion Manual, Heidelberg
Liftoff/PR strip bench SOP
Liftoff/PR strip bench SOP
Litho Process EVG Model 620 w/BSA SOP
Litho Process, Headway E-Beam Bay & Hot Plate/Oven SOP
Litho Process, Karl Suss MA6
Litho Process, Laurell E-Beam & Litho Bay & Hot Plate/Oven
Litho Process, Suss Delta 80 & Hot Plate/Oven
LS13320 Quick Start Guide
microRaman, Horiba
MRD Basic Training SOP: XRR and GIXRD
Multiprep System Operation Manual.pdf
New User Interface SOP
Nikon SOP
NRF Lithography Processes SOP
Oven, YES, Image Reversal/HMDS
Oxford DRIE SOP
PDMS Processing SOP
Photospectrometer, Filmetrics
Profilometer, Dektak 150
RCA Amerimade Bench
RIE/ICP, Unaxis SLR
RTA, Steag 100CS RTP
SCS Parylene Coater Operating Procedure
Solaris 150 RTA Operation Procedure
Sputter Deposition, KJL CMS-18 Multi-Source
Standard operating procedures for the Panalytical XPert Powder system (revision 1 - 2/6/2018).
STS PECVD SOP
TEM competency assessment
Tencor AS500 Profilometer
Tepla, Asher, M4L SOP
Tescan - basic standard operating procedure
Tescan - EBSD standard operating procedure
Tescan - EDS standard operating procedure
Tescan Driver's Test
Tousimis CPD SOP
Trion etch SOP
XPS ULVAC SOP