Standard Operating Procedures (SOPs)

Resource Specific SOPs

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Name Last Updated
Last Updated: Oct. 28, 2016 1:24 PM
Last Updated: Oct. 18, 2017 2:16 PM
Last Updated: Oct. 20, 2017 6:47 PM
Last Updated: Oct. 24, 2017 4:59 PM
AES, PHI 660 SOP Last Updated: Aug. 25, 2017 2:19 PM
AFM, Dimension 3100 SOP Last Updated: Aug. 25, 2017 2:11 PM
Asher, Anatech Barrel SCE600 SOP Last Updated: Aug. 22, 2013 4:30 PM
Bruker Optical Profilometer SOP Last Updated: Mar. 1, 2017 11:11 AM
Deep RIE, STS SOP Last Updated: Aug. 23, 2013 1:14 PM
Dicing Saws, ADT SOP Last Updated: Aug. 23, 2013 1:15 PM
E-beam Evaporator, PVD SOP Last Updated: Dec. 11, 2015 4:16 PM
EBSD reading: basics, present state Last Updated: Aug. 23, 2017 9:25 AM
EBSD reading: EDAX camera optimization presentation Last Updated: Aug. 23, 2017 9:27 AM
EBSD reading: EDAX grains and antigrains presentation Last Updated: Aug. 23, 2017 9:28 AM
EBSD reading: EDAX sample prep presentation Last Updated: Aug. 23, 2017 9:26 AM
Electron Microscope, JEOL 5700 SOP Last Updated: Aug. 22, 2013 5:22 PM
Electronic Measurement, Lakeshore 7507 SOP Last Updated: Aug. 22, 2013 5:22 PM
Ellipsometer, J.A. Woolam SOP Last Updated: Jun. 19, 2015 12:58 PM
F20 acquiring DPs procedure Last Updated: Oct. 18, 2017 4:04 PM
F20 EDS system operation Last Updated: Oct. 31, 2017 12:49 PM
F20 STEM mode operating procedure Last Updated: Nov. 22, 2017 1:35 PM
F20 TEM mode operating procedure Last Updated: Nov. 15, 2017 12:18 PM
FEI SEM SOP Last Updated: Apr. 8, 2016 10:32 AM
Flexus SOP Last Updated: Feb. 1, 2016 12:54 PM
FPP-5000 4 point probe SOP Last Updated: Feb. 20, 2015 9:26 AM
General Acids/Bases Bench Left & Right SOP Last Updated: Jun. 2, 2016 12:25 PM
Helios - FEI manufacturer manual Last Updated: Jan. 11, 2017 12:28 PM
Helios - publication on TEM specimen prep via FIB by Schaffer (2012) Last Updated: Jan. 11, 2017 12:31 PM
Helios - recipe for preparing TEm specimens Last Updated: Feb. 6, 2017 2:53 PM
Helios - standard operating procedure Last Updated: Aug. 17, 2017 2:36 PM
JEOL 2010 EDS Last Updated: Aug. 20, 2014 11:28 AM
JEOL 2010 STEM SOP Last Updated: Mar. 14, 2016 2:17 PM
JEOL 2010 TEM MODE Last Updated: Oct. 5, 2015 12:42 PM
JST Wet Bench SOP Last Updated: Jun. 2, 2016 12:24 PM
K&S 4124 Ball Bonder, Gold Ball SOP Last Updated: Aug. 22, 2013 5:22 PM
Laser Writer, Heidelberg SOP Last Updated: Jun. 12, 2017 11:11 AM
Laser Writer, Pattern Conversion Manual, Heidelberg Last Updated: Apr. 28, 2016 8:29 AM
Liftoff/PR strip bench SOP Last Updated: Feb. 23, 2016 1:39 PM
Liftoff/PR strip bench SOP Last Updated: Feb. 23, 2016 1:38 PM
Litho Process EVG Model 620 w/BSA SOP Last Updated: Aug. 22, 2013 5:22 PM
Litho Process, Headway E-Beam Bay & Hot Plate/Oven SOP Last Updated: Aug. 22, 2013 5:22 PM
Litho Process, Karl Suss MA6 Last Updated: Jan. 24, 2017 12:51 PM
Litho Process, Laurell E-Beam & Litho Bay & Hot Plate/Oven Last Updated: Aug. 22, 2013 5:22 PM
Litho Process, Suss Delta 80 & Hot Plate/Oven Last Updated: Jun. 9, 2016 12:05 PM
LS13320 Quick Start Guide Last Updated: Jan. 8, 2014 1:55 PM
microRaman, Horiba Last Updated: Jan. 28, 2016 2:38 PM
Multiprep System Operation Manual.pdf Last Updated: Oct. 30, 2017 3:56 PM
Nikon SOP Last Updated: Feb. 17, 2016 12:17 PM
NRF Lithography Processes SOP Last Updated: Aug. 3, 2017 4:41 PM
Oven, YES, Image Reversal/HMDS Last Updated: Jan. 22, 2014 2:14 PM
PDMS Processing SOP Last Updated: Sep. 22, 2017 3:19 PM
Photospectrometer, Filmetrics Last Updated: Aug. 22, 2013 5:22 PM
Profilometer, Dektak 150 Last Updated: Aug. 22, 2013 5:22 PM
RCA Amerimade Bench Last Updated: Jul. 22, 2014 3:44 PM
RIE/ICP, Unaxis SLR Last Updated: Sep. 30, 2016 1:14 PM
RTA, Steag 100CS RTP Last Updated: Feb. 11, 2014 3:51 PM
SCS Parylene Coater Operating Procedure Last Updated: Jan. 30, 2015 12:55 PM
Solaris 150 RTA Operation Procedure Last Updated: Sep. 27, 2016 4:05 PM
Sputter Deposition, KJL CMS-18 Multi-Source Last Updated: Apr. 5, 2017 11:08 AM
STS PECVD SOP Last Updated: Mar. 3, 2017 3:22 PM
TEM competency assessment Last Updated: Nov. 6, 2017 4:03 PM
Tencor AS500 Profilometer Last Updated: Sep. 13, 2017 2:44 PM
Tepla, Asher, M4L SOP Last Updated: Feb. 23, 2017 10:30 AM
Tescan - basic standard operating procedure Last Updated: Jan. 10, 2017 2:01 PM
Tescan - EBSD standard operating procedure Last Updated: Sep. 6, 2017 3:16 PM
Tescan - EDS standard operating procedure Last Updated: Mar. 13, 2017 9:46 AM
Tousimis CPD SOP Last Updated: Jan. 23, 2017 3:33 PM
Trion etch SOP Last Updated: Sep. 30, 2016 1:15 PM
XPS ULVAC SOP Last Updated: Aug. 25, 2017 2:15 PM
XPS, PHI 5100 SOP Last Updated: Aug. 25, 2017 2:23 PM