Equipment Rates

Usage rates are displayed below. Add $50/hr for staff assistance. Rates are per hour unless otherwise noted. Download Rates to CSV file

Rate Classes

  • Internal - University of Florida accounts
  • Ext. Acad/Gov - Non-UF Academic or Government
  • Ext. Intl. Acad - Non-UF International Academic
  • Ext. Affilated - Affiliated Commercial/Industrial (25% discount for member companies)
  • External - Commercial/Industrial

Show: All Characterization Fabrication

Name Type Internal Ext. Acad / Gov Ext. Intl. Acad Ext. Affilated External Notes
4 Point Probe Station Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
ALD - Cambridge Nano Fiji 200 Fabrication $90.00 $135.00 $180.00 $135.00 $180.00 Rates are per run
Allied Multi-prep Lapping and Polishing system Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Amerimade Bench BOE/HF Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 $35 charge for bath refills
Amerimade Bench SC1/SC2 Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 $35 surcharge per use
Asher - Anatech Barrel SCE600 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Asher - Tepla M4L Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Brookhaven ZetaPlus Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Bruker Optical Profilometer Characterization $24.00 $36.00 $48.00 $37.50 $50.00
Cameca SX Five FE EPMA Characterization $50.00 $75.00 $100.00 $150.00 $200.00
Colloidal Dynamics Acoustosizer IIs Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Coulter LS13320 Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Coulter Multisizer III Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Critical Point Dryer Fabrication $60.00 $90.00 $120.00 $90.00 $120.00 Rates are per run. $20 surcharge per use
Dicing Saws- ADT Fabrication $40.00 $60.00 $80.00 $60.00 $80.00
DRIE - Deep RIE, STS Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
DRIE - Oxford Plasma Pro Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
E-beam evaporator, PVD Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Electronic Measurement, Lakeshore 7507 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Ellipsometer, J.A. Woolam Characterization $20.00 $30.00 $40.00 $30.00 $40.00
FEI Helios NanoLab 600 dual beam FIB/SEM Characterization $65.00 $97.50 $130.00 $187.50 $250.00
Flexus 2320 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
FTIR/FT-Raman/FTIR Microscope - Thermo Electron Magna 760 Characterization $50.00 $75.00 $100.00 $150.00 $200.00
Furnace Tube, Thermcraft, General Hot Process Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Furnace Tube, Tystar #1 Wet and dry Ox Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 Staff run only
General Acids/Bases Bench-Left Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
General Acids/Bases Bench-Right Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
Heidelberg Laser Writer Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Horiba microRaman Characterization $44.00 $66.00 $88.00 $150.00 $200.00
JCPDS Characterization $0.00 $5.00 $10.00 $37.50 $50.00
JEOL Superprobe 733 Characterization $50.00 $75.00 $100.00 $150.00 $200.00
JST Wet Bench Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
K&S 4124 Ball Bonder, Gold Ball Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
K&S 4700 Wedge Bonder (Staff Run) Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Labconco Freeze Dryer Characterization $10.00 $15.00 $20.00 $15.00 $20.00 Rates are per use. A $10 daily surcharge applies
Litho Process EVG Model 620 w/BSA Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Litho Process Headway E-Beam Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Karl Suss MA6 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Litho Process Laurell Litho Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Suss Delta 80 & Hot Plate/Oven Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Logitech PM5 Polisher Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
Mettler Toledo TGA Characterization $15.00 $22.50 $30.00 $75.00 $100.00 Staff run only
Micro Manipulator Characterization $5.00 $7.50 $10.00 $41.25 $55.00
Microtrac Nanotrac Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Nano-CT - GE v|tome|x m 240 Characterization $35.00 $52.50 $70.00 $120.00 $160.00 Rates are for first 3 hours. Additional hours for
each rate class are: $10/hr, $15/hr, $20/hr, $30/hr, and $40/hr
Nano-CT Image Processing/Reconstruction System Characterization $7.50 $11.25 $22.50 $37.50 $50.00
Nikon LV100 Microscope Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
Objet 3D Printer Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Service work only
Oven, YES, Image Reversal/HMDS Fabrication $16.00 $24.00 $32.00 $24.00 $32.00
Paar Physica Electro Kinetic Analyzer Characterization $25.00 $67.50 $90.00 $127.50 $170.00
Panalytical XPert MRD Characterization $50.00 $75.00 $100.00 $150.00 $200.00
Panalytical XPert Powder Characterization $50.00 $75.00 $100.00 $150.00 $200.00
PDMS Process Tools Unknown $0.00 $0.00 $0.00 $0.00 $0.00
PDMS Room 235 Unknown $0.00 $0.00 $0.00 $0.00 $0.00
PECVD - STS 310PC SiO2 - SiN - Amorphous Si Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
PECVD - Unaxis 790 PECVD Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Perkin-Elmer PHI 660 - AES Characterization $35.00 $52.50 $90.00 $150.00 $200.00
Photospectrometer, Filmetrics F40 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Profilometer, Dektak 150 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Profilometer, Tencor AS500 Characterization $20.00 $30.00 $40.00 $30.00 $40.00
Quantachrome PoreMaster Mercury Porosimeter Characterization $50.00 $75.00 $100.00 $127.50 $170.00
Quantachrome Porometer 3g zh Characterization $35.00 $52.50 $70.00 $45.00 $60.00
Quantachrome Ultrapyc 1000 Gas Pycnometer Characterization $35.00 $52.50 $70.00 $45.00 $60.00
Raith 150, e-beam lithography Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 Staff run only
Raith ionLiNE - multi-species FIB Fabrication $40.00 $60.00 $80.00 $60.00 $80.00 Staff run only
Rheometer - ARES LS1 Characterization $10.00 $15.00 $20.00 $45.00 $60.00
RIE/ICP, Unaxis SLR Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
RTA, SSI Solaris 150 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
RTA, Steag 100CS RTP Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
SCS Parylene Coater Fabrication $25.00 $37.50 $50.00 $37.50 $50.00 Rates are per run
SEM - FEI Nova 430 w/EDS & CL Characterization $60.00 $90.00 $120.00 $150.00 $200.00
SEM - Hitachi S-3000 Characterization $35.00 $52.50 $100.00 $112.50 $150.00
SEM - JEOL 5700 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
SEM - Tescan MIRA3 Characterization $60.00 $90.00 $120.00 $150.00 $200.00
Solvent Bench #1 Lift Off Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench #1 PR Strip Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench 2 - hot plate and workspace Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Spin Dryer - Sitek Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
SPM/AFM Dimension 3100 Characterization $40.00 $60.00 $80.00 $112.50 $150.00
Sputter Deposition, KJL CMS-18 Multi-Source Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
TEM - Aberration Corrected S/TEM JEM-ARM200cF (NHMFL - FSU) Characterization $0.00 $0.00 $0.00 $0.00 $0.00 Service work only
TEM - FEI Tecnai F20 S/TEM Characterization $70.00 $105.00 $140.00 $187.50 $250.00
TEM - JEOL 2010F S/TEM Characterization $70.00 $105.00 $140.00 $187.50 $250.00
Trion RIE/ICP Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
TSI PSD 3603 (Aerosizer) Characterization $35.00 $52.50 $70.00 $127.50 $170.00
Unaxis 790 RIE Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Wafer Bonder, EVG 501 Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Wenesco Hotplate Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
XPS - Perkin Elmer 5100 XPS System Characterization $45.00 $67.50 $90.00 $150.00 $200.00
XPS - ULVAC-PHI XPS Characterization $60.00 $90.00 $120.00 $187.50 $250.00
Zeta Reader Mark 21 Characterization $35.00 $52.50 $70.00 $127.50 $170.00
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