Litho Process Suss Delta 20 & Hot Plate - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: rscinfo@mail.ufl.edu
Description: The Litho Bay Suss Delta 20 Spinner. + Hotplate. Latest Status Log EntrySep 4, 2019 - Resource Status Up - up

Description: The Litho Bay Suss Delta 20 Spinner. Manual dispense by pipette. Dedicated to PMMA, Negative and Positive photoresists ONLY. Other materials may be used ONLY by special request to NRF Staff. Hotplate designed for 4"-8" substrates. Sample sizes: 2"-8"round substrates. 2-6" square substrates. fragments >10mm, Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

Hotplate for 2"-8" substrates

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

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Photoresist wiki link
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