Litho Process Suss Delta 20 & Hot Plate - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Description: The Litho Bay Suss Delta 20 Spinner. + Hotplate. Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs

Description: The Litho Bay Suss Delta 20 Spinner. Manual dispense by pipette. Dedicated to PMMA, Negative and Positive photoresists ONLY. Other materials may be used ONLY by special request to NRF Staff. Hotplate designed for 4"-8" substrates. Sample sizes: 2"-8"round substrates. 2-6" square substrates. fragments >10mm, Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

Hotplate for 2"-8" substrates

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link

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