Litho Process Suss Delta 20 & Hot Plate - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Description: The Litho Bay Suss Delta 20 Spinner. + Hotplate. Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs
Title
Litho Process, Suss Delta 20 & Hot Plate SOPDownload
Suss Delta 20Download

An active Gatorlink login is required to create a new reservation.