Litho Process Suss Delta 20 & Hot Plate - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Description: The Litho Bay Suss Delta 20 Spinner. + Hotplate. Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
StartEndAvailabilityLocation
Wed, May. 8, 2024 9:00 AMWed, May. 8, 2024 11:30 AM1 Seats out of 1NRFSign Up
Wed, May. 22, 2024 9:00 AMWed, May. 22, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, May. 23, 2024 1:30 PMThu, May. 23, 2024 4:00 PM1 Seats out of 1NRFSign Up
Wed, Jun. 5, 2024 9:00 AMWed, Jun. 5, 2024 11:30 AM1 Seats out of 1NRFSign Up
Wed, Jun. 19, 2024 9:00 AMWed, Jun. 19, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, Jun. 20, 2024 1:30 PMThu, Jun. 20, 2024 4:00 PM1 Seats out of 1NRFSign Up

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