Litho Process Suss Delta 20 & Hot Plate - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Description: The Litho Bay Suss Delta 20 Spinner. + Hotplate. Latest Status Log EntryMay 30, 2024 - Resource Status Down - power failure
Contact LevelNameEmail
1Lewis, Billwalewis@ufl.edu
2Hays, Richardhays@ufl.edu

General Contact: rscinfo@mail.ufl.edu

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