Amerimade Bench SC1/SC2 - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $37.50/Hour
    • External Affiliated Commercial/Industrial: $37.50/Hour
    • External Commercial/Industrial: $50.00/Hour
    • External International Academic: $50.00/Hour
    • Internal Standard: $25.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
This bench is dedicated to RCA (SC1, HF, SC2) Batch Cleans. The bench will only be filled with chemicals when there is a need for multiple samples i.e. several wafers per run. Only clean silicon wafers (pre furnace) or oxide ONLY wafers may be processed in this bench. No other materials are allowed.

RCA cleaning wiki link
Wet Etching wiki link
Microfabrication wiki link
Latest Status Log EntryMay 23, 2024 - Resource Status Down - down awaiting sop update

This bench is dedicated to RCA (SC1, HF, SC2) Batch Cleans. The bench will only be filled with chemicals when there is a need for multiple samples i.e. several wafers per run. Only clean silicon wafers (pre furnace) or oxide ONLY wafers may be processed in this bench. No other materials are allowed.

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