Amerimade Bench SC1/SC2 - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $37.50/Hour
    • External Affiliated Commercial/Industrial: $37.50/Hour
    • External Commercial/Industrial: $50.00/Hour
    • External International Academic: $50.00/Hour
    • Internal Standard: $25.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 This bench is dedicated to RCA (SC1, HF, SC2) Batch Cleans. The bench will only be filled with chemicals when there is a need for multiple samples i.e. several wafers per run. Only clean silicon wafers (pre furnace) or oxide ONLY wafers may be processed in this bench. No other materials are allowed.

RCA cleaning wiki link
Wet Etching wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)

Calendar ICS Path

An active Gatorlink login is required to create a new reservation.