Amerimade Bench SC1/SC2 - Status: Available
|This bench is dedicated to RCA (SC1, HF, SC2) Batch Cleans. The bench will only be filled with chemicals when there is a need for multiple samples i.e. several wafers per run. Only clean silicon wafers (pre furnace) or oxide ONLY wafers may be processed in this bench. No other materials are allowed.
RCA cleaning wiki link
Wet Etching wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
An active Gatorlink login is required to create a new reservation.