Asher - Anatech Barrel SCE600 - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $67.50/Hour
    • External Affiliated Commercial/Industrial: $67.50/Hour
    • External Commercial/Industrial: $90.00/Hour
    • External International Academic: $90.00/Hour
    • Internal Standard: $45.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

Plasma Ashing wiki link
Microfabrication wiki link

NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a RSC Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs

Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

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