Asher - Anatech Barrel SCE600 - Status: Available
||Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.
Plasma Ashing wiki link
Microfabrication wiki link
NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a RSC Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. Latest Status Log EntryJan 12, 2023 - Resource Status Up - back up from N2 work
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