SCS Parylene Coater - Status: Available
||This tool is capable of depositing parylene material over substrates of varying size.
Parylene wiki link
Latest Status Log EntryJan 11, 2018 - Resource Status Up - tool is back up
This system is used to deposit a thin film of parylene, a unique polymer that provides thermal, moisture, and dielectric barriers to any vacuum compatible substrate. It is biocompatible, truly conformal (pin-hole free at 25nm thickness), and has a high mechanical strength. There are several types of parylene with differing levels and combinations of these properties. Capable of depositing Parylene C and N.