SCS Parylene Coater - Status: In Use
This tool is capable of depositing parylene material over substrates of varying size.Latest Status Log EntryOct 19, 2022 - Resource Status Up - up
This system is used to deposit a thin film of parylene, a unique polymer that provides thermal, moisture, and dielectric barriers to any vacuum compatible substrate. It is biocompatible, truly conformal (pin-hole free at 25nm thickness), and has a high mechanical strength. There are several types of parylene with differing levels and combinations of these properties. Capable of depositing Parylene C and N.
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