SCS Parylene Coater - Status: Available
  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $37.50/Run
    • External Affiliated Commercial/Industrial: $37.50/Run
    • External Commercial/Industrial: $50.00/Run
    • External International Academic: $50.00/Run
    • Internal Standard: $25.00/Run
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Microscopy Sample Prep (125)
  • In Cleanroom: No
  • Main Contact: Scott Gapinski
 This tool is capable of depositing parylene material over substrates of varying size.

Parylene wiki link
Latest Status Log EntrySep 5, 2019 - Resource Status Up - up
Capabilities Training Prerequisites Calendar Contacts Docs

This system is used to deposit a thin film of parylene, a unique polymer that provides thermal, moisture, and dielectric barriers to any vacuum compatible substrate. It is biocompatible, truly conformal (pin-hole free at 25nm thickness), and has a high mechanical strength. There are several types of parylene with differing levels and combinations of these properties.

Capable of depositing Parylene C and N.