SCS Parylene Coater - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $39.00/Run
    • External Affiliated Commercial/Industrial: $37.50/Run
    • External Commercial/Industrial: $52.00/Run
    • External International Academic: $52.00/Run
    • Internal Standard: $26.00/Run
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Microscopy Sample Prep (125)
  • In Cleanroom: No
  • Main Contact: Scott Gapinski

This tool is capable of depositing parylene material over substrates of varying size.

Parylene wiki link

Training Video (YouTube)

Latest Status Log EntryJan 11, 2024 - Resource Status Up - chiller repaired
Capabilities Training Prerequisites Calendar Contacts Docs

This system is used to deposit a thin film of parylene, a unique polymer that provides thermal, moisture, and dielectric barriers to any vacuum compatible substrate. It is biocompatible, truly conformal (pin-hole free at 25nm thickness), and has a high mechanical strength. There are several types of parylene with differing levels and combinations of these properties.

Capable of depositing Parylene C and N.

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