FIB - FEI Helios NanoLab 600 dual beam FIB/SEM - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $97.50/Hour
    • External Affiliated Commercial/Industrial: $187.50/Hour
    • External Commercial/Industrial: $250.00/Hour
    • External International Academic: $130.00/Hour
    • Internal Standard: $65.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NRB (0557)
  • Room: Room (8B)
  • Room Max Occupancy: 1
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
The FEI Helios NanoLab 600 DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Instrument Specifications:

  • Schottky field emission gun Elstar SEM column; 0.3 - 30 kV operating voltage with <0.1 nm resolution
  • Ga liquid metal FIB source
  • Sidewinder FIB column with 2 - 30 kV operating voltage
  • In-situ Pt deposition
  • Omniprobe AutoProbe 200 in-situ micromanipulator
  • EDAX Octane Elite (70 mm squared active area) SDD EDS
  • EDAX Velocity EBSD camera

  • YouTube video demonstrating what is covered in basic training of the Helios

    YouTube video tutorial on use of the Helios to prepare lamellas


    1. You must create an RSC user account with a PI-approved funding source.

    2. You must complete RSC general safety training.

    3. You must complete the Radiation Safety Short Course AND obtain a dosimeter badge (regardless if you are working with radioactive or non-radioactive materials).

    4. You must complete the FIB Knowledge Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

    Latest Status Log EntryMay 12, 2021 - Resource Status Up - OMNIPROBE STILL NOT WORKING but system otherwise fully operational

  • High-quality TEM lamella preparation via in-situ liftouts
  • High-resolution electron beam imaging of FIB cross sections
  • Automated serial sectioning
  • Nanoscale compositional analysis using EDS
  • Texture and crystallographic analysis using EBSD