FIB - FEI Helios NanoLab 600 dual beam FIB/SEM - Status: Down

  • Current Status: Down
  • Use Rates:
    • External Academic & Government: $97.50/Hour
    • External Affiliated Commercial/Industrial: $187.50/Hour
    • External Commercial/Industrial: $250.00/Hour
    • External International Academic: $130.00/Hour
    • Internal Standard: $65.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NRB (0557)
  • Room: Room (8B)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
The FEI Helios NanoLab 600 DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Ga liquid metal ion FIB source; Sidewinder FIB column with 2 - 30 kV operating voltage; Schottky field emission gun Elstar SEM column with 0.3 - 30 kV operating voltage; Omniprobe AutoProbe 200 in-situ micromanipulator; in-situ Pt deposition.


1. You must create an RSC user account with a PI-approved funding source.

2. You must complete RSC general safety training.

3. You must complete the Radiation Safety Short Course AND obtain a dosimeter badge (regardless if you are working with radioactive or non-radioactive materials).

4. You must complete the FIB Knowledge Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

Latest Status Log EntryMar 23, 2020 - Resource Status Down - Access to RSC facilities suspended until further notice (including NFMCF)

FIB/SEM DualBeam systems provide an expanded range of capabilities not possible with separate FIB and SEM tools:

  • Damage-free electron beam high-resolution imaging of FIB cross sections.
  • Real-time electron beam imaging during FIB milling.
  • High resolution elemental microanalysis of defect cross sections.
  • In-situ lift-out TEM specimen preparation.