FIB/SEM - FEI Helios NanoLab 600i dual beam - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $100.50/Hour
    • External Affiliated Commercial/Industrial: $193.50/Hour
    • External Commercial/Industrial: $258.00/Hour
    • External International Academic: $134.00/Hour
    • Internal Standard: $67.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NRB (0557)
  • Room: Room (8B)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
The FEI Helios NanoLab 600i DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Instrument Specifications:

  • Elstar SEM column; 0.3 - 30 kV operating voltage with <1 nm resolution
  • Field-free (high-resolution) and immersion (ultrahigh-resolution) SEM modes
  • Schottky field emission gun electron source
  • Sidewinder FIB column with 2 - 30 kV operating voltage; 1 pA - 65 nA beam currents
  • Ga liquid metal ion source
  • Everhart-Thornley and through lens detectors; configurable for SE+BSE or BSE only imaging
  • In-situ Pt deposition GIS
  • Omniprobe AutoProbe 200 in-situ micromanipulator
  • EDAX Octane Elite (70 mm squared active area) SDD energy dispersive spectroscopy system
  • EDAX Velocity CMOS EBSD camera
  • EDAX TEAM EDS and EBSD acquisition and analysis software
  • EDAX OIM 8 texture and crystallographic analysis software
  • Auto Slice and View serial sectioning software

  • YouTube video demonstrating what is covered in basic training of the Helios

    YouTube video tutorial on use of the Helios to prepare lamellas

    Zoom workshop on dual beam FIB/SEM tips, tricks, and other useful info (recorded 11/19/21)


    1. Please create an RSC user account with a PI-approved funding source.

    2. Please complete RSC general safety training.

    3. Please complete the Radiation Safety Short Course AND obtain a dosimeter badge (regardless if you are working with radioactive or non-radioactive materials).

    4. Please complete the FIB Knowledge Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

    Latest Status Log EntrySep 16, 2023 - User Note: The current N2 tank was very low when I left yesterday; it will likely go dry sometime today; there is already another full tank connected to the line; just switch the two black valves on the wall to connect the full tank when necessary.

    Use Prerequisites

    Computer AccessRequires computer access be setupCheck Your Status
    Funding SourceRequires permission to an active funding sourceCheck Your Status
    SEM CompetencyRequires completion of SEM Competency QuizCheck Your Status
    FIB CompetencyRequires completion of FIB Competency QuizCheck Your Status
    Work PlanRequires a work plan be approved by PI and staffCheck Your Status
    Agreement FormRequires completed agreement form for equipment usageCheck Your Status
    RSC Safety TrainingRequires completion of safety trainingCheck Your Status
    NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.Check Your Status
    Equipment TrainingRequires completion of equipment trainingCheck Your Status

    An active Gatorlink login is required to create a new reservation.