Litho Process Suss Delta 80 & Hot Plate/Oven - Status: Available

Description: The Litho Bay Suss Delta 80 Spinner automatically applies AZ1512 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff. Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates. Pump 1 resist = AZ 1512 photoresist Pump 2 resist = AZ 9260 photoresist Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

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Microfabrication wiki linkLatest Status Log EntryOct 19, 2021 - User Note: checked az1512 for bubbles. no bubbles found. dispense checked on clean prime silicon.

Description: The Litho Bay Suss Delta 80 Spinner automatically applies Shipley S1813 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff. Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates. Pump 1 resist = Shipley S1813 photoresist Pump 2 resist = AZ 9260 photoresist Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.