Litho Process Suss Delta 80 & Hot Plate/Oven - Status: Available

Description: The Litho Bay Suss Delta 80 Spinner automatically applies AZ1512 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff. Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates. Pump 1 resist = AZ 1512 photoresist Pump 2 resist = AZ 9260 photoresist Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryJan 3, 2022 - Resource Status Up - tool is back up from break
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
StartEndAvailabilityLocation
Wed, Feb. 2, 2022 9:00 AMWed, Feb. 2, 2022 11:30 AM1 Seats out of 1NRFSign Up
Thu, Feb. 3, 2022 1:30 PMThu, Feb. 3, 2022 4:00 PM1 Seats out of 1NRFSign Up
Wed, Feb. 16, 2022 9:00 AMWed, Feb. 16, 2022 11:30 AM1 Seats out of 1NRFSign Up
Wed, Mar. 2, 2022 9:00 AMWed, Mar. 2, 2022 11:30 AM1 Seats out of 1NRFSign Up
Thu, Mar. 3, 2022 1:30 PMThu, Mar. 3, 2022 4:00 PM1 Seats out of 1NRFSign Up
Wed, Mar. 16, 2022 9:00 AMWed, Mar. 16, 2022 11:30 AM1 Seats out of 1NRFSign Up

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