Litho Process Suss Delta 80 & Hot Plate/Oven - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Description: The Litho Bay Suss Delta 80 Spinner automatically applies AZ1512 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff. Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates. Pump 1 resist = AZ 1512 photoresist Pump 2 resist = AZ 9260 photoresist Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryDec 20, 2022 - User Note: cleaned system, bowls, drain tank etc.
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
Wed, Jun. 7, 2023 9:00 AMWed, Jun. 7, 2023 11:30 AM1 Seats out of 1NRFSign Up
Wed, Jun. 21, 2023 9:00 AMWed, Jun. 21, 2023 11:30 AM1 Seats out of 1NRFSign Up
Thu, Jun. 22, 2023 1:30 PMThu, Jun. 22, 2023 4:00 PM1 Seats out of 1NRFSign Up
Wed, Jul. 5, 2023 9:00 AMWed, Jul. 5, 2023 11:30 AM1 Seats out of 1NRFSign Up
Wed, Jul. 19, 2023 9:00 AMWed, Jul. 19, 2023 11:30 AM1 Seats out of 1NRFSign Up
Thu, Jul. 20, 2023 1:30 PMThu, Jul. 20, 2023 4:00 PM1 Seats out of 1NRFSign Up

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