Litho Process Suss Delta 80 & Hot Plate/Oven - Status: Available
||Description: The Litho Bay Suss Delta 80 Spinner automatically applies AZ1512 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff.
Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates.
Pump 1 resist = AZ 1512 photoresist
Pump 2 resist = AZ 9260 photoresist
Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.
Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryJan 3, 2022 - Resource Status Up - tool is back up from break
|Computer Access||Requires computer access be setup|
|Funding Source||Requires permission to an active funding source|
|Work Plan||Requires a work plan be approved by PI and staff|
|Agreement Form||Requires completed agreement form for equipment usage|
|RSC Safety Training||Requires completion of safety training|
|NRF Building Access||Requires issue of an id badge and entry badge and/or access level to be set.|
|Equipment Training||Requires completion of equipment training|