SEM - FEI Nova 430 w/EDS & CL - Status: Down

  • Current Status: Down
  • Use Rates:
    • External Academic & Government: $90.00/Hour
    • External Affiliated Commercial/Industrial: $150.00/Hour
    • External Commercial/Industrial: $200.00/Hour
    • External International Academic: $120.00/Hour
    • Internal Standard: $60.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: FE Sem (134)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
The FEI Nova NanoSEM 430 is a FE SEM with resolution below 1 nm. The tool has an EDS detector and a monochromatic CL detector included.

Scanning Electron Microscopy wiki link
Guide to SEM Observation
Energy-Dispersive x-ray Spectroscopy (EDS) wiki link
Cathodoluminescence wiki link

TRAINING REQUIREMENTS: Course EMA 6507 or Discussing with staff the content of the following reading material: Goldstein, J.I., Newbury, D.E., Echlin. P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori,C., and Lifshin, E. Scanning Electron Microscopy and X-Ray Microanalysis, A Text for Biologists, Materials Scientists, and Geologists. Third Edition. 2003. ISBN 0-306-47292-9 Chapters 2, 3 and 5.
You will be directed to a quiz sign up link when requesting training for any of the SEM's.
Latest Status Log EntryOct 30, 2017 - User Note: Ran Plasma Cleaner for 1h. No issues.

The FEI Nova NanoSEM 430 is a state-of-the-art SEM that utilized a field emission electron source and immersion lens technology to obtain resolution below 1 nm. The NanoSEM is capable of imaging from 8X to 300,000X, working distance permitting. Accelerating voltage can be varied from 50V (with beam deceleration) to 30kV. It features a motorized XYZ stage with full 360° rotation and -10° to 90° tilt and can hold a full 4” wafer.