SEM - FEI Nova 430 w/EDS & CL - Status: In Use
||The FEI Nova NanoSEM 430 is a FE SEM with resolution below 1 nm. The tool has an EDS detector and a monochromatic CL detector included.
Scanning Electron Microscopy wiki link
Guide to SEM Observation
Energy-Dispersive x-ray Spectroscopy (EDS) wiki link
Cathodoluminescence wiki link
TRAINING REQUIREMENTS: Course EMA 6507 or Discussing with staff the content of the following reading material: Goldstein, J.I., Newbury, D.E., Echlin. P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori,C., and Lifshin, E. Scanning Electron Microscopy and X-Ray Microanalysis, A Text for Biologists, Materials Scientists, and Geologists. Third Edition. 2003. ISBN 0-306-47292-9 Chapters 2, 3 and 5.
You will be directed to a quiz sign up link when requesting training for any of the SEM's.
Latest Status Log EntryMar 2, 2021 - User Note: the stage hardware has error, can't move the stage along x and y axes!
The FEI Nova NanoSEM 430 is a state-of-the-art SEM that utilized a field emission electron source and immersion lens technology to obtain resolution below 1 nm. The NanoSEM is capable of imaging from 8X to 300,000X, working distance permitting. Accelerating voltage can be varied from 50V (with beam deceleration) to 30kV. It features a motorized XYZ stage with full 360° rotation and -10° to 90° tilt and can hold a full 4” wafer.