SEM - Tescan MIRA3 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $90.00/Hour
    • External Affiliated Commercial/Industrial: $150.00/Hour
    • External Commercial/Industrial: $200.00/Hour
    • External International Academic: $120.00/Hour
    • Internal Standard: $60.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: EPMA Lab (285)
  • Room Max Occupancy: 4
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski

The Tescan MIRA3 scanning electron microscope rasters a focused energetic beam (probe) of electrons across a specimen surface. The interactions of the beam with the specimen are detected and then recorded as a function of probe position and used to generate two-dimensional images of the specimen. The signals that can be detected include secondary and backscattered electrons (for imaging), X-rays (for chemical analysis), and electron backscattered diffraction patterns (for structural analysis).

Instrument Specifications:

  • Schottky field emission gun; 0.3 - 30 kV operating voltage
  • Everhart-Thornley detector
  • Dedicated backscattered electron detector
  • EDAX Octane Pro (10 mm squared active area) SDD EDS
  • EDAX Hikari Plus EBSD camera
  • EDAX OIM Analysis 8 software

  • Latest Status Log EntrySep 16, 2021 - User Note: Replaced Tip. Done by AJ from Tescan. Instrument had original tip. System working OK.

  • ~1 nm resolution SEM imaging
  • Nanoscale compositional analysis using EDS
  • Texture and crystallographic analysis using EBSD