SEM - Tescan MIRA3 - Status: Available
||The Tescan MIRA3 scanning electron microscope rasters a focused energetic beam (probe) of electrons across a specimen surface. The interactions of the beam with the specimen are detected and then recorded as a function of probe position and used to generate two-dimensional images of the specimen. The signals that can be detected include secondary and backscattered electrons (for imaging), X-rays (for chemical analysis), and electron backscattered diffraction patterns (for structural analysis).
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Latest Status Log EntryNov 9, 2017 - Resource Status Up - tested instrument; all normal
0.2 - 30 keV operating voltage with Schottky field emission gun ZrO/W source; EDAX Octane Pro energy dispersive spectroscopy (EDS) system for detection of X-rays; EDAX Hikari Plus camera for collection of electron backscattered diffraction (EBSD) patterns; EDAX TEAM software for collection and analysis of EDS and EBSD data (either individually or simultaneously); EDAX OIM Analysis 8 software for analysis of EBSD data.