SEM - Tescan MIRA3 - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $93.00/Hour
    • External Affiliated Commercial/Industrial: $157.50/Hour
    • External Commercial/Industrial: $210.00/Hour
    • External International Academic: $124.00/Hour
    • Internal Standard: $62.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External)
  • Building: NANO (0070)
  • Room: EPMA Lab (285)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
 *ANALYSIS OF RADIOACTIVE SPECIMENS WITH THIS INSTRUMENT IS STRICTLY PROHIBITED*

The Tescan MIRA3 scanning electron microscope rasters a focused energetic beam (probe) of electrons across a specimen surface. The interactions of the beam with the specimen are detected and then recorded as a function of probe position and used to generate two-dimensional images of the specimen. The signals that can be detected include secondary and backscattered electrons (for imaging), X-rays (for chemical analysis), and electron backscattered diffraction patterns (for structural analysis).

Instrument Specifications:

  • Schottky field emission gun; 0.3 - 30 kV operating voltage
  • Everhart-Thornley detector
  • Dedicated backscattered electron detector
  • EDAX Octane Pro (10 mm squared active area) SDD EDS
  • EDAX Hikari Plus EBSD camera
  • EDAX OIM Analysis 8 software


    • TRAINING REQUIREMENTS: Course EMA 6507 or Discussing with staff the content of the following reading material: Goldstein, J.I., Newbury, D.E., Echlin. P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori,C., and Lifshin, E. Scanning Electron Microscopy and X-Ray Microanalysis, A Text for Biologists, Materials Scientists, and Geologists. Third Edition. 2003. ISBN 0-306-47292-9 Chapters 2, 3 and 5. You will be directed to a quiz sign up link when requesting training for any of the SEM's. Latest Status Log EntryFeb 28, 2023 - User Note: Restarting and testing EDS computer that froze on previous user. After long windows update all seems to be working now.
    Capabilities Training Prerequisites Calendar Contacts Docs

  • ~1 nm resolution SEM imaging
  • Nanoscale compositional analysis using EDS
  • Texture and crystallographic analysis using EBSD

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