SEM - Tescan MIRA3 - Status: Up

  • Current Status: Up
  • Use Rates:
    • External Academic & Government: $90.00/Hour
    • External Affiliated Commercial/Industrial: $150.00/Hour
    • External Commercial/Industrial: $200.00/Hour
    • External International Academic: $120.00/Hour
    • Internal Standard: $60.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: MAIC&PAIC Lab (285)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski
The Tescan MIRA3 scanning electron microscope rasters a focused energetic beam (probe) of electrons across a specimen surface. The interactions of the beam with the specimen are detected and then recorded as a function of probe position and used to generate two-dimensional images of the specimen. The signals that can be detected include secondary and backscattered electrons (for imaging), X-rays (for chemical analysis), and electron backscattered diffraction patterns (for structural analysis).

- To request time on the instrument please click here.

Latest Status Log EntrySep 13, 2017 - Resource Status Up - power restored; completely operational

0.2 - 30 keV operating voltage with Schottky field emission gun ZrO/W source; EDAX Octane Pro energy dispersive spectroscopy (EDS) system for detection of X-rays; EDAX Hikari Plus camera for collection of electron backscattered diffraction (EBSD) patterns; EDAX TEAM software for collection and analysis of EDS and EBSD data (either individually or simultaneously); EDAX OIM Analysis 8 software for analysis of EBSD data.