SEM - Tescan MIRA3 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $93.00/Hour
    • External Affiliated Commercial/Industrial: $157.50/Hour
    • External Commercial/Industrial: $210.00/Hour
    • External International Academic: $124.00/Hour
    • Internal Standard: $62.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: EPMA Lab (285)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski

The Tescan MIRA3 scanning electron microscope rasters a focused energetic beam (probe) of electrons across a specimen surface. The interactions of the beam with the specimen are detected and then recorded as a function of probe position and used to generate two-dimensional images of the specimen. The signals that can be detected include secondary and backscattered electrons (for imaging), X-rays (for chemical analysis), and electron backscattered diffraction patterns (for structural analysis).

Instrument Specifications:

  • Schottky field emission gun; 0.3 - 30 kV operating voltage
  • Everhart-Thornley detector
  • Dedicated backscattered electron detector
  • EDAX Octane Pro (10 mm squared active area) SDD EDS
  • EDAX Hikari Plus EBSD camera
  • EDAX OIM Analysis 8 software

  • TRAINING REQUIREMENTS: Course EMA 6507 or Discussing with staff the content of the following reading material: Goldstein, J.I., Newbury, D.E., Echlin. P., Joy, D.C., Romig, A.D. Jr., Lyman, C.E., Fiori,C., and Lifshin, E. Scanning Electron Microscopy and X-Ray Microanalysis, A Text for Biologists, Materials Scientists, and Geologists. Third Edition. 2003. ISBN 0-306-47292-9 Chapters 2, 3 and 5. You will be directed to a quiz sign up link when requesting training for any of the SEM's. Latest Status Log EntryJun 2, 2023 - User Note: PM done by AJ. Mechanical pump tip seals replaced. Software updates. Column alignments.

    Use Prerequisites

    Computer AccessRequires computer access be setupCheck Your Status
    Funding SourceRequires permission to an active funding sourceCheck Your Status
    SEM CompetencyRequires completion of SEM Competency QuizCheck Your Status
    Work PlanRequires a work plan be approved by PI and staffCheck Your Status
    Agreement FormRequires completed agreement form for equipment usageCheck Your Status
    RSC Safety TrainingRequires completion of safety trainingCheck Your Status
    NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.Check Your Status
    Equipment TrainingRequires completion of equipment trainingCheck Your Status

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