Furnace Tube, Tystar #1 Wet and dry Ox - Status: Available

IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 25 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 4".

This is a staff run only resource.

Thermal Oxidation wiki link
Microfabrication wiki link
Latest Status Log EntryJan 4, 2021 - Resource Status Up - recover from holiday break

IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 25 wafers per batch.

This is a staff run only resource.