Furnace Tube, Tystar #1 Wet and dry Ox - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $37.50/Hour
    • External Affiliated Commercial/Industrial: $37.50/Hour
    • External Commercial/Industrial: $50.00/Hour
    • External International Academic: $50.00/Hour
    • Internal Standard: $25.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 25 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 4".

This is a staff run only resource.

Thermal Oxidation wiki link
Microfabrication wiki link
Latest Status Log EntryMay 28, 2024 - Resource Status Down - Tool down due to contamination issues.

Use Prerequisites

Computer AccessRequires computer access be setupCheck Your Status
Funding SourceRequires permission to an active funding sourceCheck Your Status
Work PlanRequires a work plan be approved by PI and staffCheck Your Status
Agreement FormRequires completed agreement form for equipment usageCheck Your Status
RSC Safety TrainingRequires completion of safety trainingCheck Your Status
NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.Check Your Status
Equipment TrainingRequires completion of equipment trainingCheck Your Status

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