Furnace Tube, Tystar #1 Wet and dry Ox - Status: Available
All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!
Used for processing up to 25 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 4".
This is a staff run only resource.
Thermal Oxidation wiki link
Microfabrication wiki link
Latest Status Log EntrySep 15, 2023 - Resource Status Up - Exhaust is back.
|Computer Access||Requires computer access be setup||Check Your Status|
|Funding Source||Requires permission to an active funding source||Check Your Status|
|Work Plan||Requires a work plan be approved by PI and staff||Check Your Status|
|Agreement Form||Requires completed agreement form for equipment usage||Check Your Status|
|RSC Safety Training||Requires completion of safety training||Check Your Status|
|NRF Building Access||Requires issue of an id badge and entry badge and/or access level to be set.||Check Your Status|
|Equipment Training||Requires completion of equipment training||Check Your Status|
An active Gatorlink login is required to create a new reservation.