Furnace Tube, Tystar #1 Wet and dry Ox - Status: In Use

  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $37.50/Hour
    • External Affiliated Commercial/Industrial: $37.50/Hour
    • External Commercial/Industrial: $50.00/Hour
    • External International Academic: $50.00/Hour
    • Internal Standard: $25.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 25 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 4".

This is a staff run only resource.

Thermal Oxidation wiki link
Microfabrication wiki link
Latest Status Log EntrySep 15, 2023 - Resource Status Up - Exhaust is back.

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