Cameca SX Five FE EPMA - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $78.00/Hour
    • External Affiliated Commercial/Industrial: $157.50/Hour
    • External Commercial/Industrial: $210.00/Hour
    • External International Academic: $104.00/Hour
    • Internal Standard: $52.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External)
  • Building: NANO (0070)
  • Room: EPMA Lab (285)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
 Rate Notes: Published rates are for first 8 hours. Rate then decreases to $12.50/hr. for Internal Standard -$18.75/hr. for External Academic & Gov. - $25/hr. External Int. Academic - $37.50/hr. for External Affiliated Commercial/Industrial - $50/hr. for External Commercial/Industrial. Runs not to exceed 24 hours in total.

Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping with Sub-Micron Spatial Resolution. The SXFiveFE provides:
- Field emission source and SEM with 6nm resolution @ 25-30keV.
- Automation capabilities for-long term unattended analysis.
- Quantitative analysis at submicron scale.
- High quality minor and trace element analysis.
- Mapping at high spartial resolution.
- High precision WDS spectrometers for high reproducibility.
- Detection limits down to 100ppm (0.01%)

Introduction to Electron Probe Micro analysis
Electron Probe Micro Analysis Wiki
CAMECA SXFive FE

Latest Status Log EntryMar 20, 2023 - User Note: Checking instrument after service visit. Column was baked and now down to 1.7E-7barr.
Capabilities Training Prerequisites Calendar Contacts Docs

SXFiveFE Main Specifications and Configuration:

- Maximum accelerating voltage: 30kV.

- Beam diameter in analytical mode:
- 80nm @ 20kV, 10nA.
- 100nm @ 10kV, 10nA.
- 150nm @ 5KV, 10nA.

- Maximum beam current: 400nA to 600nA

- Beam Stability: +- 0.5% per hour @ 20kV, 20nA.

- Installed detectors: 4 BSE’s, SE and EDS (EDAX Element).

- Installed WDS Spectrometers and configurations:
* SP1: Inclined, less sensitive to specimen height, for mapping rough surface samples. Low pressure with LiF, PET, TAP and PC2 crystals installed.
* SP2: Vertical, high pressure for greater sensitivity, with LLiF and LPET crystals.
* SP3: Vertical, low pressure, with TAP and PC0 crystals.
* SP4: Vertical, low pressure, with LPET and TAP crystals.

-Crystals Elemental Coverage

- Available standards:
-Geology Standards
-Metallurgy Standards
-44 Metal STD
-Rare Earth

- Stage: The SXFiveFE is equipped with a high precision stage capable of 0.1um micro steps reproducible within 1um by using optical encoders.

- Available holders and sample size specifications:
* HO6, HOTS2+2, HOTS4

- Sample Preparation

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