Critical Point Dryer - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $93.00/Run
    • External Affiliated Commercial/Industrial: $93.00/Run
    • External Commercial/Industrial: $124.00/Run
    • External International Academic: $124.00/Run
    • Internal Standard: $62.00/Run
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Wet Processing (167)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process.

Supercritical Drying wiki link
Microfabrication wiki link
Latest Status Log EntryApr 11, 2024 - Resource Status Up - LCO2 cylinder did not have a siphon tube. Repaired leaks and corrosion damage. Confirmed that process works.
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The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process. By using LCO2 as the transitional fluid at the critical point, it eliminates stiction and surface tension problems. The tool is capable of processing samples from 6 inch wafers to small pieces in about an hour.

Each tool run has a consumable fee of $20 to recover the acid, solvent and LCO2 costs.

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