Critical Point Dryer - Status: Available

The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process.

Supercritical Drying wiki link
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Latest Status Log EntryFeb 8, 2021 - User Note: ran system through full process without error.

The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process. By using LCO2 as the transitional fluid at the critical point, it eliminates stiction and surface tension problems. The tool is capable of processing samples from 6 inch wafers to small pieces in about an hour.

Each tool run has a consumable fee of $20 to recover the acid, solvent and LCO2 costs.