Critical Point Dryer - Status: Available
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The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process.
Supercritical Drying wiki link Microfabrication wiki link Latest Status Log EntryApr 11, 2024 - Resource Status Up - LCO2 cylinder did not have a siphon tube. Repaired leaks and corrosion damage. Confirmed that process works. |
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