Flexus 2320 - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $30.00/Hour
    • External Affiliated Commercial/Industrial: $30.00/Hour
    • External Commercial/Industrial: $40.00/Hour
    • External International Academic: $40.00/Hour
    • Internal Standard: $20.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Bio/Nano Bio Processing (163)
  • In Cleanroom: Yes
  • Main Contact: rscinfo@mail.ufl.edu
The Flexus 2320 determines wafer curvature by measuring the angle of deflection of a laser beam off the surface 6”, 4”, 3” and 2” diameter substrates. Film stress is determined by comparing the change in radius of curvature of the substrate, with and without the film.

Radius of curvature wiki linkLatest Status Log EntrySep 13, 2017 - Resource Status Up - tool is now up

The Flexus 2320 determines wafer curvature by measuring the angle of deflection of a laser beam off the surface 6”, 4”, 3” and 2” diameter substrates. Film stress is determined by comparing the change in radius of curvature of the substrate, with and without the film.