Flexus 2320 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $31.50/Hour
    • External Affiliated Commercial/Industrial: $31.50/Hour
    • External Commercial/Industrial: $42.00/Hour
    • External International Academic: $42.00/Hour
    • Internal Standard: $21.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Bio/Nano Bio Processing (163)
  • In Cleanroom: Yes
  • Main Contact: David Hays
The Flexus 2320 determines wafer curvature by measuring the angle of deflection of a laser beam off the surface 6”, 4”, 3” and 2” diameter substrates. Film stress is determined by comparing the change in radius of curvature of the substrate, with and without the film.

Radius of curvature wiki linkLatest Status Log EntryMay 30, 2024 - Resource Status Up - back up from power issue
Equipment ImageDownload
Flexus SOPDownload

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