RTA, SSI Solaris 150 - Status: Available

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryFeb 15, 2021 - Resource Status Up - Water filter replaced. Seems to be working now. Please let us know if you have any issues.

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.