RTA, SSI Solaris 150 - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Device Assembly & Processing (122)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryOct 17, 2017 - Resource Status Up - TC replaced and system tested. Its ready for use.

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.