RTA, SSI Solaris 150 - Status: Down

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryNov 9, 2021 - User Note: Aluminum block has a water obstruction not allowing the flow switch to engage. Will have to be dissembled for deep cleaning.

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.