RTA, SSI Solaris 150 - Status: Available

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryMay 7, 2021 - User Note: Replaced water flow switch. Replaced filter, Increased water flow to system on the chiller by turning by-pass valve.

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.