RTA, SSI Solaris 150 - Status: Available

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

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Latest Status Log EntryApr 8, 2022 - User Note: Checking PH of chiller water. 7-8

Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.