RTA, SSI Solaris 150 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Device Assembly & Processing (122)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntrySep 20, 2023 - Resource Status Up - Ready to use.
Training TopicDescriptionRatesApprox Session Length (hrs)
RTA Solaris 150 TrainingStandard Rate: $49.00/Complete User Training1
Wed, Dec. 27, 2023 9:00 AMWed, Dec. 27, 2023 10:00 AM1 Seats out of 1NRFSign Up
Wed, Jan. 24, 2024 9:00 AMWed, Jan. 24, 2024 10:00 AM1 Seats out of 1NRFSign Up

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