RTA, SSI Solaris 150 - Status: Available
||Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.
Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryJan 20, 2023 - Resource Status Up - Ready to use
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