RTA, SSI Solaris 150 - Status: Available
||Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.
Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryJan 20, 2023 - Resource Status Up - Ready to use
|Computer Access||Requires computer access be setup||Check Your Status|
|Funding Source||Requires permission to an active funding source||Check Your Status|
|Work Plan||Requires a work plan be approved by PI and staff||Check Your Status|
|Agreement Form||Requires completed agreement form for equipment usage||Check Your Status|
|RSC Safety Training||Requires completion of safety training||Check Your Status|
|NRF Building Access||Requires issue of an id badge and entry badge and/or access level to be set.||Check Your Status|
|Equipment Training||Requires completion of equipment training||Check Your Status|
An active Gatorlink login is required to create a new reservation.