Profilometer, Tencor AS500 - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $30.00/Hour
    • External Affiliated Commercial/Industrial: $30.00/Hour
    • External Commercial/Industrial: $40.00/Hour
    • External International Academic: $40.00/Hour
    • Internal Standard: $20.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Microscopy Sample Prep (125)
  • In Cleanroom: No
  • Main Contact: Bill Lewis
Surface profiler

Profilometer wiki link
Latest Status Log EntrySep 13, 2017 - Resource Status Up - up

The Tencor Alpha-Step AS500 is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 300um and can perform a line scan as long as 10mm. Vertical resolution is 1A at 13 µm range and 25A at 300 µm range. The stylus force can be varied from 1mg to 99mg. The AS500 can accommodate sample up to 150mm with maximum height of 15mm.

Profilometer wiki link