TEM - FEI Themis Z S/TEM - Status: In Use


The FEI Themis Z S/TEM is a state-of-the-art Cs probe-corrected field emission gun scanning/transmission electron microscope capable of providing micro- to atomic-scale structural, morphological, and chemical information.

Instrument Specifications:

  • Configured for 60, 200, or 300 kV operation; X-FEG high brightness Schottky field emission gun with monochromator
  • S-twin objective lens with 5.4 mm pole piece gap; tomography, single-, and double-tilt (SoftLoc) holders available; piezo-enhanced CompuStage with 20 pm minimum step size
  • Bottom-mounted FEI Ceta 16 megapixel CMOS camera with speed enhancement; Fischione Instruments Model 3000 HAADF-STEM detector; FEI BF/DF STEM detectors; 4D-STEM and DPC imaging capable
  • <60, <80, and <100 pm STEM resolution at 300, 200, and 60 kV, respectively.
  • Super-X windowless SDD energy dispersive spectroscopy system with 0.7 sr solid angle of collection; fully automated EDS tomography data acquisition
  • Gatan Continuum ER post-column energy filter; DualEELS; BF/DF STEM detectors; 2.5 and 5.0 mm EELS entrance apertures; 9 mm imaging aperture, energy selecting slit
  • Latest Status Log EntryFeb 19, 2021 - Resource Status Up - beam found

  • <100 pm resolution HAADF, LAADF, BF, ADF, ABF, DPC, and 4D STEM imaging
  • Atomic-resolution energy dispersive and electron energy loss spectroscopy
  • High-resolution (0.1 eV) EELS for fine-structure analysis
  • Fully automated EDS tomography
  • Energy filtered (zero loss, elemental mapping) imaging
  • High-resolution (lattice) imaging