S/TEM - FEI Themis Z - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $120.00/Hour
    • External Affiliated Commercial/Industrial: $225.00/Hour
    • External Commercial/Industrial: $300.00/Hour
    • External International Academic: $144.00/Hour
    • Internal Standard: $80.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: SPM (137)
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski

The FEI Themis Z S/TEM is a state-of-the-art Cs probe-corrected field emission gun scanning/transmission electron microscope capable of providing micro- to pico-scale structural, morphological, magnetic, and chemical information; it is the most advanced electron microscope of any kind within a 500 mi radius of the University of Florida.

Instrument Specifications:

  • Configured for 60, 200 (default), or 300 kV operation
  • X-FEG high brightness Schottky field emission gun with Wien filter monochromator; ~0.10 eV energy spread with filtering enabled (at 200 kV)
  • Cs probe-corrected (to 5th order) S-twin objective lens with 5.4 mm pole piece gap
  • FEI single-tilt holder, FEI high-visibility, low-background double-tilt (SoftLoc) holder, and Fischione Instruments Model 2021 tomography holder
  • Piezo-enhanced CompuStage with 20 pm minimum step size
  • Bottom-mounted FEI Ceta 16 megapixel CMOS camera with speed enhancement
  • Fischione Instruments Model 3000 HAADF-STEM detector; FEI BF, DF2 (segmented), and DF4 (segmented) STEM detectors for DPC, iDPC, and dDPC imaging
  • High-resolution (lattice) imaging with <0.1 nm information limit
  • <100, <80, and <60 pm STEM resolution at 60, 200, and 300 kV, respectively
  • Dedicated Lorentz lens for TEM mode imaging of magnetic domains; STEM imaging of magnetic domains with ~1 nm resolution enabled by Cs probe-correction and DPC-STEM imaging
  • Super-X windowless SDD energy dispersive spectroscopy system with 0.7 sr solid angle of collection
  • Fully automated TEM, STEM, and STEM-EDS tomography data acquisition
  • Inspect 3D reconstruction and Avizo visualization software for processing and analysis of tomography data (separate onsite workstation)
  • EMPAD 128x128 direct electron detector; single electron sensitivity with 30 bit dynamic range; diffraction pattern recorded at every pixel in a map (4D-STEM) up to 512x512 resolution
  • Gatan Continuum ER post-column energy filter; 2.5 and 5.0 mm entrance apertures for EELS and 9 mm entrance aperture for EFTEM; energy selecting slit for EFTEM; DualEELS; BF/ADF STEM detectors

  • YouTube video demonstrating STEM alignment and <80 pm HAADF-STEM imaging using the Themis Z

    YouTube video demonstrating atomic-scale and nanoscale STEM-EDS mapping using the Themis Z
    Latest Status Log EntrySep 21, 2023 - User Note: ~9:30 am today, found FluCam crashed and would not work after repeatedly closing and reopening; closed all software and stopped/restarted server; HT shutoff as a result and was immediately set back to 200 kV; system (and FluCam) worked normally afterwards

    • <100 pm resolution HAADF, LAADF, BF, ADF, ABF, DPC, iDPC, dDPC, and 4D STEM imaging
    • Atomic-resolution EDS and EELS mapping
    • High-resolution (~0.10 eV) EELS for fine-structure analysis
    • Fully automated EDS tomography
    • Energy filtered (zero loss, elemental mapping) TEM imaging
    • Lorentz TEM and STEM imaging of magnetic domains
    • High-resolution (lattice) TEM imaging with <0.1 nm information limit
    • Selected area, precession, and convergent beam electron diffraction

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