Sputter Deposition, Evatec Clusterline 200 - Status: Available
|Evatec Clusterline 200
Sputter Deposition wiki link
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Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Pulsed DC deposition of high quality piezoelectric films of AlN and AlScN.
Designed for 6 inch wafers but can process 4inch using a pocket carrier wafer.
Capable of substrate temperatures of 450C
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