Sputter Deposition, Evatec Clusterline 200 - Status: Down

Evatec Clusterline 200

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryApr 19, 2024 - User Note: restart system after tool shut itself off

Key features: Pulsed DC deposition of high quality piezoelectric films of AlN and AlScN.
Designed for 6 inch wafers but can process 4inch using a pocket carrier wafer.
Capable of substrate temperatures of 450C

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