Sputter Deposition, Evatec Clusterline 200 - Status: Down

Current Status: Down
Training: View Topics/Sessions
Use Rates:
Building: NANO (0070)
Room: Cleanroom, Film Deposition (164)
In Cleanroom: Yes
Main Contact: David Hays

Evatec Clusterline 200

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryApr 19, 2024 - User Note: restart system after tool shut itself off

Capabilities Training Prerequisites Calendar Contacts Docs

Contact Level	Name	Email
1	Hays, David	dhays@nimet.ufl.edu

General Contact: rscinfo@mail.ufl.edu

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