Fabrication Equipment Rates
Usage rates are displayed below. Add $50/hr for staff assistance. Rates are per hour unless otherwise noted. Download Rates to CSV file
Rate Classes
- Internal - University of Florida accounts
- Ext. Acad/Gov - Non-UF Academic or Government
- Ext. Intl. Acad - Non-UF International Academic
- Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
- External - Commercial/Industrial
FY2020 Rate Listing
Show:
Name | Type | Internal | Ext. Acad / Gov | Ext. Intl. Acad | Ext. Affiliated | External | Notes |
---|---|---|---|---|---|---|---|
4 Point Probe Station | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
ALD - Cambridge Nano Fiji 200 | Fabrication | $90.00 | $135.00 | $180.00 | $135.00 | $180.00 | Rates are per run. (Max run 24 hrs) |
Allied Multi-prep Lapping and Polishing system | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Users must purchase their own consumables for this equipment. |
Amerimade Bench BOE/HF | Fabrication | $24.00 | $36.00 | $48.00 | $36.00 | $48.00 | $35 charge for bath refills |
Amerimade Bench SC1/SC2 | Fabrication | $24.00 | $36.00 | $48.00 | $36.00 | $48.00 | $35 surcharge per use |
Asher - Anatech Barrel SCE600 | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Asher - Tepla M4L | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Critical Point Dryer | Fabrication | $60.00 | $90.00 | $120.00 | $90.00 | $120.00 | Rates are per run. $20 surcharge per use |
Dicing Saws- ADT | Fabrication | $40.00 | $60.00 | $80.00 | $60.00 | $80.00 | |
DRIE - Deep RIE, STS | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
DRIE - Oxford Plasma Pro | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
E-beam evaporator, PVD | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
Electronic Measurement, Lakeshore 7507 | Fabrication | $20.00 | $30.00 | $40.00 | $30.00 | $40.00 | |
Flexus 2320 | Fabrication | $20.00 | $30.00 | $40.00 | $30.00 | $40.00 | |
Furnace Tube, Thermcraft, General Hot Process | Fabrication | $20.00 | $30.00 | $40.00 | $30.00 | $40.00 | |
Furnace Tube, Tystar #1 Wet and dry Ox | Fabrication | $24.00 | $36.00 | $48.00 | $36.00 | $48.00 | Staff run only |
General Acids/Bases Bench-Left | Fabrication | $24.00 | $36.00 | $48.00 | $36.00 | $48.00 | |
Heidelberg Laser Writer | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
JST Wet Bench | Fabrication | $24.00 | $36.00 | $48.00 | $36.00 | $48.00 | |
K&S 4124 Ball Bonder, Gold Ball | Fabrication | $28.00 | $42.00 | $56.00 | $42.00 | $56.00 | |
K&S 4700 Wedge Bonder (Staff Run) | Fabrication | $28.00 | $42.00 | $56.00 | $42.00 | $56.00 | |
Litho Process EVG Model 620 w/BSA | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Litho Process Headway E-Beam Bay & Hot Plate/Oven | Fabrication | $32.00 | $48.00 | $64.00 | $48.00 | $64.00 | |
Litho Process Karl Suss MA6 | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Litho Process Laurell Litho Bay & Hot Plate/Oven | Fabrication | $32.00 | $48.00 | $64.00 | $48.00 | $64.00 | |
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven | Fabrication | $32.00 | $48.00 | $64.00 | $48.00 | $64.00 | |
Litho Process Suss Delta 20 & Hot Plate | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Litho Process Suss Delta 80 & Hot Plate/Oven | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Nikon LV100 Microscope | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
Objet 3D Printer | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Service work only |
Oven, YES, Image Reversal/HMDS | Fabrication | $16.00 | $24.00 | $32.00 | $24.00 | $32.00 | |
PDMS Process Tools - Room 235 | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
PDMS-Spinner | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
PECVD - STS 310PC SiO2 - SiN - Amorphous Si | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
PECVD - Unaxis 790 PECVD | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
Photospectrometer, Filmetrics F40 | Fabrication | $20.00 | $30.00 | $40.00 | $30.00 | $40.00 | |
Profilometer, Dektak 150 | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Raith 150, e-beam lithography | Fabrication | $30.00 | $45.00 | $60.00 | $52.50 | $60.00 | Staff run only |
RIE/ICP, Unaxis SLR | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
RTA, SSI Solaris 150 | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
RTA, Steag 100CS RTP | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
SCS Parylene Coater | Fabrication | $25.00 | $37.50 | $50.00 | $37.50 | $50.00 | Rates are per run |
SEM - JEOL 5700 | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
Solvent Bench #1 Lift Off | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
Solvent Bench #1 PR Strip | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
Solvent Bench 2 - hot plate and workspace | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
Spin Dryer - Sitek | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
Sputter Deposition, AJA | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
Sputter Deposition, KJL CMS-18 Multi-Source | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
Trion RIE/ICP | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
Unaxis 790 RIE | Fabrication | $48.00 | $72.00 | $96.00 | $72.00 | $96.00 | |
Wafer Bonder, EVG 501 | Fabrication | $32.00 | $48.00 | $64.00 | $48.00 | $64.00 | |
Wenesco Hotplate | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 |