Fabrication Equipment Rates

Usage rates are displayed below. Add $50/hr for staff assistance. Rates are per hour unless otherwise noted. Download Rates to CSV file

Rate Classes

  • Internal - University of Florida accounts
  • Ext. Acad/Gov - Non-UF Academic or Government
  • Ext. Intl. Acad - Non-UF International Academic
  • Ext. Affilated - Affiliated Commercial/Industrial (25% discount for member companies)
  • External - Commercial/Industrial

Show: All Characterization Fabrication

Name Type Internal Ext. Acad / Gov Ext. Intl. Acad Ext. Affilated External Notes
4 Point Probe Station Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
ALD - Cambridge Nano Fiji 200 Fabrication $90.00 $135.00 $180.00 $135.00 $180.00 Rates are per run
Amerimade Bench BOE/HF Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 $35 charge for bath refills
Amerimade Bench SC1/SC2 Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 $35 surcharge per use
Asher - Anatech Barrel SCE600 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Asher - Tepla M4L Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Critical Point Dryer Fabrication $60.00 $90.00 $120.00 $90.00 $120.00 Rates are per run. $20 surcharge per use
Dicing Saws- ADT Fabrication $40.00 $60.00 $80.00 $60.00 $80.00
DRIE - Deep RIE, STS Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
DRIE - Oxford Plasma Pro Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
E-beam evaporator, PVD Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Electronic Measurement, Lakeshore 7507 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Flexus 2320 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Furnace Tube, Thermcraft, General Hot Process Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Furnace Tube, Tystar #1 Wet and dry Ox Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 Staff run only
General Acids/Bases Bench-Left Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
General Acids/Bases Bench-Right Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
Heidelberg Laser Writer Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
JST Wet Bench Fabrication $24.00 $36.00 $48.00 $36.00 $48.00
K&S 4124 Ball Bonder, Gold Ball Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
K&S 4700 Wedge Bonder (Staff Run) Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process EVG Model 620 w/BSA Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Litho Process Headway E-Beam Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Karl Suss MA6 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Litho Process Laurell Litho Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Litho Process Suss Delta 80 & Hot Plate/Oven Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Logitech PM5 Polisher Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
Nikon LV100 Microscope Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
Objet 3D Printer Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Service work only
Oven, YES, Image Reversal/HMDS Fabrication $16.00 $24.00 $32.00 $24.00 $32.00
PECVD - STS 310PC SiO2 - SiN - Amorphous Si Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Photospectrometer, Filmetrics F40 Fabrication $20.00 $30.00 $40.00 $30.00 $40.00
Profilometer, Dektak 150 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Raith 150, e-beam lithography Fabrication $24.00 $36.00 $48.00 $36.00 $48.00 Staff run only
Raith ionLiNE - multi-species FIB Fabrication $40.00 $60.00 $80.00 $60.00 $80.00 Staff run only
RIE/ICP, Unaxis SLR Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
RTA, SSI Solaris 150 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
RTA, Steag 100CS RTP Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
SCS Parylene Coater Fabrication $25.00 $37.50 $50.00 $37.50 $50.00 Rates are per run
SEM - JEOL 5700 Fabrication $44.00 $66.00 $88.00 $66.00 $88.00
Solvent Bench #1 Lift Off Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench #1 PR Strip Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench 2 - hot plate and workspace Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Sputter Deposition, KJL CMS-18 Multi-Source Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Trion RIE/ICP Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Unaxis 790 RIE Fabrication $48.00 $72.00 $96.00 $72.00 $96.00
Wafer Bonder, EVG 501 Fabrication $32.00 $48.00 $64.00 $48.00 $64.00
Wenesco Hotplate Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
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