RTA, Steag 100CS RTP - Status: Available

Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryJan 4, 2021 - Resource Status Up - up from shutdown

Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.