RTA, Steag 100CS RTP - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntryNov 8, 2018 - Resource Status Up - RTA IS BACK UP! Replaced lamp power board and 2 boards inside the control computer. repaired water leak.

Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.