RTA, Steag 100CS RTP - Status: Available
||Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.
Rapid Thermal Processing wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
An active Gatorlink login is required to create a new reservation.