E-beam evaporator, PVD - Status: Available

4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance.

E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryOct 11, 2021 - User Note: P1-Ti, P2-Cr, P3-Al, P4- Au. Swapped in Chromium in P2.

4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.

Loaded Source Materials
Note:
Pocket 1 _Ti_
Pocket 2 _Cr_
Pocket 3 _Al_
Pocket 4 _Au_
Sptr Gun _PML_

E-Beam Consumables Surcharge

Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Si - undoped, Ta, Ti, W