E-beam evaporator, PVD - Status: Available
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4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater Reservations are required and must be made 24 hrs in advance. E-Beam evaporator Wiki Link Microfabrication wiki link Latest Status Log EntrySep 15, 2023 - Resource Status Up - Valve replaced. Ready for use. |
4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater
Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.
Loaded Source Materials
Note:
Pocket 1 _Ti_
Pocket 2 _Cr_
Pocket 3 _Pd_
Pocket 4 _Au_
Sptr Gun _PML_
E-Beam Consumables Surcharge
Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Si - undoped, Ta, Ti, W
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