E-beam evaporator, PVD - Status: Down

  • Current Status: Down
  • Use Rates:
    • External Academic & Government: $72.00/Hour
    • External Affiliated Commercial/Industrial: $72.00/Hour
    • External Commercial/Industrial: $96.00/Hour
    • External International Academic: $96.00/Hour
    • Internal Standard: $48.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Al Ogden
4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance.

E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryNov 20, 2017 - Resource Status Down - overnight maint, regen

4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.

Loaded Source Materials
Note:
Pocket 1 _Ti_
Pocket 2 _Al_
Pocket 3 _Ni_
Pocket 4 _Au_
Sptr Gun _PML_

E-Beam Consumables Surcharge

Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Pt, Si - undoped, Ta, Ti, W