E-beam evaporator, PVD - Status: In Use
  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance.

E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryMar 26, 2024 - Resource Status Up - Targets: Ag, Cr, Au, Ti. Cryopump Regen and reloaded more helium gas.
Capabilities Training Prerequisites Calendar Contacts Docs
Contact LevelNameEmail
1Downing, Marcomadowning@ufl.edu
2Trucco, Andresandres5@ufl.edu
3Gila, Brentbgila@ufl.edu

General Contact: rscinfo@mail.ufl.edu

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