E-beam evaporator, PVD - Status: Available
||4 pocket 15cc e-beam,
one 3" DC sputter source,
Reservations are required and must be made 24 hrs in advance.
E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryMay 19, 2023 - User Note: Added more Al and Ti to respective crucible. 1-Ti, 2-Pd, 3-Al, 4-Au
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