E-beam evaporator, PVD - Status: Down
||4 pocket 15cc e-beam,
one 3" DC sputter source,
Reservations are required and must be made 24 hrs in advance.
E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryNov 29, 2023 - Resource Status Down - Overnight pump down.
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