E-beam evaporator, PVD - Status: In Use
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4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater Reservations are required and must be made 24 hrs in advance. E-Beam evaporator Wiki Link Microfabrication wiki link Latest Status Log EntryApr 23, 2024 - User Note: Targets: Ag, Cr, Pd, Ti. |
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