E-beam evaporator, PVD - Status: Down
||4 pocket 15cc e-beam,
one 3" DC sputter source,
Reservations are required and must be made 24 hrs in advance.
E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryNov 29, 2023 - Resource Status Down - Overnight pump down.
|Computer Access||Requires computer access be setup||Check Your Status|
|Funding Source||Requires permission to an active funding source||Check Your Status|
|Work Plan||Requires a work plan be approved by PI and staff||Check Your Status|
|Agreement Form||Requires completed agreement form for equipment usage||Check Your Status|
|RSC Safety Training||Requires completion of safety training||Check Your Status|
|NRF Building Access||Requires issue of an id badge and entry badge and/or access level to be set.||Check Your Status|
|Equipment Training||Requires completion of equipment training||Check Your Status|
An active Gatorlink login is required to create a new reservation.