E-beam evaporator, PVD - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance.

E-Beam evaporator Wiki Link
Microfabrication wiki link
Latest Status Log EntryMay 20, 2024 - User Note: Pockets: Al, Au, Si, Ti.
Training TopicDescriptionRatesApprox Session Length (hrs)
E-beam PVD Evaporator TrainingStandard Rate: $96.00/Complete User Training3
Wed, Jun. 19, 2024 9:00 AMWed, Jun. 19, 2024 12:00 PM1 Seats out of 1NRFSign Up
Thu, Jul. 11, 2024 9:00 AMThu, Jul. 11, 2024 12:00 PM1 Seats out of 1NRFSign Up
Wed, Jul. 17, 2024 9:00 AMWed, Jul. 17, 2024 12:00 PM1 Seats out of 1NRFSign Up

To request a training session at a custom date & time, please click an option below.

Request and Sign Up for E-beam PVD Evaporator Training | Request and Sign Up for Priority E-beam PVD Evaporator Training

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