E-beam evaporator, PVD - Status: Available
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4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater Reservations are required and must be made 24 hrs in advance. E-Beam evaporator Wiki Link Microfabrication wiki link Latest Status Log EntryMay 19, 2023 - User Note: Added more Al and Ti to respective crucible. 1-Ti, 2-Pd, 3-Al, 4-Au |
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
Reservations are required and must be made 24 hrs in advance.
Please Note: This tool enforces a 24 minute buffer between reservations. Remember that Your reservation must be made at least 24 hours in advance.
An active Gatorlink login is required to create a new reservation.